Time constant of defect relaxation in ion-irradiated 3C-SiC

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منابع مشابه

Divacancy in 3C- and 4H-SiC: An extremely stable defect

Rights: © 2002 American Physical Society (APS). This is the accepted version of the following article: Torpo, L. & Staab, T. E. M. & Nieminen, Risto M. 2002. Divacancy in 3Cand 4H-SiC : An extremely stable defect. Physical Review B. Volume 65, Issue 8. 085202/1-10. ISSN 1550-235X (electronic). DOI: 10.1103/physrevb.65.085202, which has been published in final form at http://journals.aps.org/prb...

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The growth of 3C-SiC on hexagonal polytype is addressed and a brief review is given for various growth techniques. The Chemical Vapor Deposition is shown as a suitable technique to grow single domain 3C epilayers on 4H-SiC substrate and a 12.5 μm thick layer is demonstrated; even thicker layers have been obtained. Various characterization techniques including optical microscopy, X-ray technique...

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ژورنال

عنوان ژورنال: Applied Physics Letters

سال: 2015

ISSN: 0003-6951,1077-3118

DOI: 10.1063/1.4921471